Thin films for the lithium-ion-energy storage technology and ferromagnetic, high frequency nanocomposite films are produced by means of physical vapour deposition (PVD) and characterizedby regarding their microstructure and functional propertes.
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| Patterned FeCoTaN-film and micromagnetic simulation |
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| Diffraction diagram (TEM) of a Fe-Co-Hf-N-layer |
