Bridging stresses from R-curves of silicon nitrides

  • Autor:

    Funfschilling, S; Fett, T; Hoffmann, MJ; Oberacker, R; Jelitto, H; Schneider, GA; Hartelt, M; Riesch-Oppermann, H
  • Quelle:

    JOURNAL OF MATERIALS SCIENCE, 2009, Band 44, Heft 14, S. 3900-3904

Abstract