Chapter 22: Development of a Simulation Tool for Wear in Microsystems

  • Author:

    , N. Huber, O. Kraft

  • Source:

    Micro-Engineering in Metals and Ceramics Design Part II, Volume Ed.: D. Löhe, J. H. Haußelt (Advanced Micro and Nano Systems Vol. 4, Ed.: H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink and O. Tabata), Wiley-VCH Verlag GmbH, Weinheim, Germany, 2005 (ISBN 3-527-31493-8)