Microtribology of Solid Lubricant Coatings for MEMS
P. Stoyanov, R. Chromik
Hysitron Corporation: Nanomechanical
Testing Applications, Band nanoScratch
& ScanningWear (April 2011)
Sliding contacts with micron and nanometer scale contact sizes are an important topic of research in the field of tribology. Typically, research in this area seeks to improve the performance and reliability of micro- and nano-electromechanical systems (MEMS & NEMS) by further understanding of both idealized, single asperity contact and rough, multi-asperity micro-scale contacts. At the micro-/ nano- length scales, however, testing methodologies that are typically used for macrotribological testing (e.g. pin-on-disk) are not useful due to the complexities that derive from small contact areas and normal loads. This article presents a methodology for tribological testing at the microscopic length scale that allows for measuring the friction, the different contributions of wear, and the interfacial shear strength.