1. Introduction: Application and Processing of Microsystems
2. Scaling Effects
3. Fundamentals: Stress and Strain, (anisotropic) Hooke's Law
4. Fundamentals: Mechanics of Beams and Membranes
5. Thin Film Mechanics: Origin and Role of Mechanical Stresses
6. Characterization of Mechanical Properties of Thin Films and Small Structures: Measurement of Stresses and Mechnical Parameters such as Young'sModulus and YieldDtrength; Thin Film Adhesion and Stiction
7. Transduction: Piezo-resistivity, Piezo-electric Effect, Elektrostatics,...
8. Aktuation: Inverse Piezo-electric Effect, Shape Memory, Elektromagnetic Actuation,…

The students know and understand size and scaling effects in micro- and nanosystems. They understand the impact of mechanical phenomena in small dimensions. Based on this they can judge how they determine material processing as well as working principles and design of microsensors and microactuators.

regular attendance: 22,5 hours
self-study: 97,5 hours

oral exam ca. 30 minutes

Folien,
1. M. Ohring: "The Materials Science of Thin Films", Academic Press, 1992
2. L.B. Freund and S. Suresh: "Thin Film Materials"
3. M. Madou: Fundamentals of Microfabrication", CRC Press 1997
4. M. Elwenspoek and R. Wiegerink: "Mechanical Microsensors" Springer Verlag 2000
5. Chang Liu: Foundations of MEMS, Illinois ECE Series, 2006